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Introduction | |
Technologies | |
Overview of shape memory alloys and thin films | |
Martensitic transformation | |
Deposition techniques for TiNi films | |
Ti/Ni multilayer thin films | |
Film microstructure and crystallization | |
Mechanical properties | |
Stress, texture, wrinkling and relief | |
Ion irradiation | |
Laser post annealing and theory | |
Applications | |
Overview of applications | |
Theory on shape memory microactuator | |
Binary and ternary alloy film diaphragm microactuators | |
Microactuator applications | |
Microvalves | |
Superelastic thin films and applications for medical devices | |
Sputter-deposited Ti-Ni superelastic microtubes | |
Microcage-biopsy applications | |
Shape memory thin film composite microactuators | |
Micromirror application | |
Table of Contents provided by Publisher. All Rights Reserved. |
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