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9789810218843

Topics in Growth and Device Processing of Iii-V Semiconductors

by ; ;
  • ISBN13:

    9789810218843

  • ISBN10:

    9810218842

  • Format: Hardcover
  • Copyright: 1996-06-01
  • Publisher: WORLD SCIENTIFIC PUB CO INC
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Table of Contents

Introduction
Compound Semiconductor Growth by Metalorganic Molecular Beam Epitaxy (MOMBE)p. 1
Growth of Heterojunction Bipolar Transistors from Molecular Beamsp. 74
Heteroepitaxyp. 110
Implant Doping and Isolationp. 158
Rapid Thermal Annealingp. 227
Wet and Dry Etching of III-V Semiconductorsp. 263
Hydrogen in Crystalline Semiconductors: III-V Compoundsp. 341
Heterojunction Bipolar Transistors: Processing and Devicesp. 418
Novel Heterostructure Field Effect Transistorsp. 480
Indexp. 543
Table of Contents provided by Blackwell. All Rights Reserved.

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