Transparent Oxide Electronics From Materials to Devices

by Barquinha, Pedro; Martins, Rodrigo; Pereira, Luis; Fortunato, Elvira

• ISBN13: 9780470683736
• ISBN10: 0470683732
• Edition: 1st
• Format: Hardcover
• Copyright: 2012-04-09
• Publisher: Wiley

Summary

The book will begin with a summary of the concepts of transparent electronics before discussing the role of active and passive applications. Then it will review the history of thin film transistors and current and emerging technologies. Further chapters will cover oxide semiconductors, dielectric materials and applications, including the groundbreaking paper transistors and memory developed by the authors themselves. Finally, the authors will give an overview of the future of transparent electronics.

Author Biography

Elvira Fortunato is Associate Professor and Director of Institute for Nanotechnologies, Nanomaterials and Nanosciences at the New University of Lisbon. She is one of the inventors of paper transistors and paper memory and was one of the pioneers of European research on thin-film transistors based on oxide semiconductors. She has been Associate Editor of Rapid Research Letters Physica Status Solidi since November 2006 and is the recipient of several awards, including the award for Scientific Excellence from the Portuguese Science Foundation (2005). She is the author of more than 200 papers and has been an invited speaker at MRS, E-MRS and NAIST. Coauthors at CENIMAT, New University of Lisbon: Rodrigo Ferrão de Paiva Martins, Luís Pereira, Pedro Barquinha.

Table of Contents

Preface	p. xiii
Acknowledgments	p. xv
Introduction	p. 1
Oxides and Transparent Electronics: Fundamental Research or Heading Towards Commercial Products?	p. 1
The Need for Transparent (Semi)Conductors	p. 3
Reaching Full Transparency: Dielectrics and Substrates	p. 5
References	p. 6
N-type Transparent Semiconducting Oxides	p. 9
Introduction: Binary and Multicomponent Oxides	p. 9
Binary Compounds: the Examples of Zinc Oxide and Indium Oxide	p. 9
Ternary and Quaternary Compounds: the Examples of Indium-Zinc Oxide and Gallium-Indium-Zinc Oxide	p. 12
Sputtered n-TSOs: Gallium-Indium-Zinc Oxide System	p. 16
Dependence of the Growth Rate on Oxygen Content in the Ar+O2, Mixture and Target Composition	p. 16
Structural and Morphological Properties	p. 18
Electrical Properties	p. 22
Optical Properties	p. 41
Sputtered n-TSOs: Gallium-Zinc-Tin Oxide System	p. 49
Solution-Processed n-TSOs	p. 51
ZTO by Spray-pyrolysis	p. 51
ZTO by Sol-gel Spin-coating	p. 52
GIZO Sol-gel by Spin-coating	p. 52
References	p. 55
P-type Transparent Conductors and Semiconductors	p. 63
Introduction	p. 63
P-type Transparent Conductive Oxides	p. 64
Thin Film Copper Oxide Semiconductors	p. 66
Role of Oxygen in the Structure, Electrical and Optical Performance	p. 70
Thin Film Tin Oxide Semiconductors	p. 75
Structure, Composition and Morphology of Tin Oxide Films	p. 78
Electrical and Optical Properties of Tin Oxide Films	p. 84
References	p. 94
Gate Dielectrics in Oxide Electronics	p. 101
Introduction	p. 101
High-¿ Dielectrics: Why Not?	p. 102
Requirements	p. 103
High-¿ Dielectrics Deposition	p. 106
Sputtered High-¿ Dielectrics in Oxide TFTs	p. 106
Hafnium Oxide	p. 107
Multicomponent Co-sputtered HfO2, Based Dielectrics	p. 117
Multicomponent Dielectrics from Single Target	p. 126
Tantalum Oxide (Ta2O5)	p. 130
Multicomponent Ta2O5 Based Dielectrics	p. 133
Multilayer Dielectrics	p. 138
High-¿ Dielectrics/Oxide Semiconductors Interface	p. 141
Summary	p. 146
References	p. 147
The (R)evolution of Thin-Film Transistors (TFTs)	p. 155
Introduction: Device Operation, History and Main Semiconductor Technologies	p. 155
Device Structure and Operation	p. 155
Brief History of TFTs	p. 161
Comparative Overview of Dominant TFT Technologies	p. 168
Fabrication and Characterization of Oxide TFTs	p. 170
N-type GIZO TFTs by Physical Vapor Deposition	p. 171
N-type GZTO TFTs by Physical Vapor Deposition	p. 187
N-type Oxide TFTs by Solution Processing	p. 189
P-type Oxide TFTs by Physical Vapor Deposition	p. 193
N-type GIZO TFTs with Sputtered Dielectrics	p. 196
References	p. 202
Electronics With and On Paper	p. 211
Introduction	p. 211
Paper in Electronics	p. 212
Paper Properties	p. 214
Structure, Morphology and Thermal Properties	p. 214
Electrical Properties of the Paper	p. 218
Resistivity Behaviour of Transparent Conductive Oxides Deposited on Paper	p. 223
Paper Transistors	p. 225
Current Transport in Paper Transistors	p. 228
Floating Gate Non-volatile Paper Memory Transistor	p. 230
Memory Paper Device Feasibility and Stability	p. 233
Memory Selective and Charge Retention Time Behaviors	p. 234
Complementary Metal Oxide Semiconductor Circuits With and On Paper-Paper CMOS	p. 237
Capacitance-Voltage and Current-Voltage Characteristics of N/P-Type Paper Transistors	p. 240
N- and P-channel Paper FET Operation	p. 243
CMOS Inverter Working Principles	p. 244
Paper CMOS Performance	p. 246
Solid State Paper Batteries	p. 249
Electrochromic Paper Transistors	p. 252
Paper UV Light Sensors	p. 255
References	p. 256
A Glance at Current and Upcoming Applications	p. 267
Introduction: Emerging Areas for (Non-)transparent Electronics Based on Oxide Semiconductors	p. 267
Active Matrices for Displays	p. 268
Display Market Overview and Future Trends	p. 268
Driving Schemes and TFT Requirements for LCD and OLED Displays	p. 269
Displays with Oxide-Based Backplanes	p. 271
Transparent Circuits	p. 273
Inverters and Ring Oscillators	p. 273
The Introduction of Oxide CMOS	p. 275
Oxide Semiconductor Heterojunctions	p. 278
Oxide Semiconductor Heterojunctions in the Literature	p. 278
GIZO Heterojunctions Fabricated at CENTMAT	p. 279
Field Effect Biosensors	p. 280
Device Types and Working Principles	p. 280
Oxide-Based Biosensors Fabricated at CENTMAT	p. 281
References	p. 284
Index	p. 287
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