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9780126939507

A User's Guide to Ellipsometry

by
  • ISBN13:

    9780126939507

  • ISBN10:

    0126939500

  • Format: Hardcover
  • Copyright: 1992-10-01
  • Publisher: Academic Pr

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Supplemental Materials

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Summary

Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.

Table of Contents

Preface
Theoretical Aspectsp. 1
Instrumentationp. 19
Using Optical Parameters to Determine Material Propertiesp. 35
Determining Optical Parameters for Inaccessible Substrates and Unknown Filmsp. 51
Extremely Thin Filmsp. 65
The Special Case of Polysiliconp. 82
The Effect of Roughnessp. 95
Case Studiesp. 107
Dissolution and Swelling of Thin Polymer Filmsp. 109
Ion Beam Interaction with Siliconp. 119
Dry Oxidation of Metalsp. 127
Optical Properties of Sputtered Chromium Suboxide Thin Filmsp. 135
Ion-Assisted Film Growth of Zirconium Dioxidep. 139
Electrochemical/Ellipsometric Studies of Oxides on Metalsp. 142
Amorphous Hydrogenated Carbon Filmsp. 160
Fluoropolymer Films on Silicon from Reactive Ion Etchingp. 168
Various Films on InPp. 180
Benzotriazole and Benzimidazole on Copperp. 186
Gas Adsorption on Metal Surfacesp. 196
Silicon-Germanium Thin Filmsp. 213
Profiling of HgCdTep. 217
Oxides and Nitrides of Siliconp. 221
Appendicesp. 231
Appendix A: Del/Psi Trajectory Calculationsp. 233
Appendix B: Effective Medium Considerationsp. 246
Appendix C: Literature Values of Optical Constants of Various Materialsp. 253
Indexp. 257
Table of Contents provided by Blackwell. All Rights Reserved.

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