Vacuum Microelectronics

by Zhu, Wei

• ISBN13: 9780471322443
• ISBN10: 047132244X
• Edition: 1st
• Format: Hardcover
• Copyright: 2001-10-03
• Publisher: Wiley-Interscience

Summary

Expert coverage of vacuum microelectronics-principles, devices, and applicationsThe field of vacuum microelectronics has advanced so swiftly that commercial devices are being fabricated, and applications are being developed in displays, wireless communications, spacecraft, and electronics for use in harsh environments. It is a rapidly evolving, interdisciplinary field encompassing electrical engineering, materials science, vacuum engineering, and applied physics.This book surveys the fundamentals, technology, and device applications of this nascent field. Editor Wei Zhu brings together some of the world's foremost experts to provide comprehensive and in-depth coverage of the entire spectrum of vacuum microelectronics. Topics include: Field emission theory Metal and silicon field emitter arrays Novel cold cathode materials Field emission flat panel displays Cold cathode microwave devices Vacuum Microelectronics is intended for practitioners in the display, microwave, telecommunications, and microelectronics industries and in government and university research laboratories, as well as for graduate students majoring in electrical engineering, materials science, and physics. It provides cutting-edge, expert coverage of the subject and serves as both an introductory text and a professional reference.

Author Biography

WEI ZHU received his PhD in solid state science from Pennsylvania State University. He was a visiting assistant professor at North Carolina State University before he joined AT&T Bell Laboratories (later Lucent Technologies Bell Laboratories) in 1993. He is currently a member of technical staff in the Applied Materials Research Department at Agere Systems, formerly the microelectronics group of Lucent Technologies, where he specializes in carbon-based materials and applications. His interests include novel cold cathode materials and devices, nanoscale materials and technology, MEMS, and optical waveguide materials and devices. He holds more than thirty patents and has coauthored over forty papers. He organized the first Materials Research Society symposium on vacuum microelectronics in 1998. He is a member of the Materials Research Society and the Optical Society of America.

Table of Contents

Preface	ix
List of Contributors	xiii
Historical Overview	1	(12)
Takao Utsumi
Introduction	1	(1)
Shoulders' Proposal	1	(1)
Groundbreaking Work	2	(2)
Invention of Spindt Cathode	4	(1)
Field Emitter Arrays	5	(1)
New Cathode Materials	6	(1)
Future	7	(6)
Dedication	9	(1)
References	9	(4)
Technological Overview	13	(20)
Gregory P. Kochanski
Wei Zhu
Yehuda Goren
Introduction	13	(1)
Promise and Reality	14	(1)
Case Studies	15	(15)
Outlook	30	(3)
References	31	(2)
Theory of Field Emission	33	(72)
Kevin L. Jensen
Introduction	33	(2)
One-Dimensional Tunneling Theory: Metals	35	(34)
Emission from Multi-Dimensional Structures	69	(28)
Conclusion	97	(8)
Acknowledgments	98	(1)
References	98	(7)
Spindt Field Emitter Arrays	105	(82)
Charles A. (Capp) Spindt
Ivor Brodie
Christopher E. Holland
Paul R. Schwoebel
Introduction	105	(1)
A Brief History of the Spindt Cathode	106	(2)
Fabrication Technology	108	(33)
Performance	141	(38)
Applications and Ongoing Developments	179	(2)
Summary	181	(6)
Acknowledgments	181	(1)
References	182	(5)
Silicon Field Emitter Arrays	187	(60)
Jonathan Shaw
Junji Itoh
Introduction	187	(3)
Fabrication of Silicon FEAs	190	(9)
Free Electron Theory of Field Emission	199	(6)
Emission Characterization of Silicon FEAs	205	(19)
Local Circuit Elements	224	(17)
Summary	241	(6)
Dedication	242	(1)
References	242	(5)
Novel Cold Cathode Materials	247	(42)
Wei Zhu
Peter K. Baumann
Christopher A. Bower
Introduction	247	(1)
Diamond Emitters	248	(17)
Carbon Nanotube Emitters	265	(9)
Other Cold Cathodes	274	(6)
Conclusion	280	(9)
References	280	(9)
Field Emission Flat Panel Displays	289	(60)
Heinz H. Busta
Introduction	289	(1)
Field Emission Displays	290	(44)
Other Display Technologies	334	(7)
Summary	341	(8)
Institutions Involved in FED Commercialization	342	(1)
Acknowledgments	343	(1)
References	343	(6)
Cold Cathode Microwave Devices	349	(44)
R. Allen Murphy
Mary Anne Kodis
Introduction	349	(1)
Microwave Amplifiers	350	(5)
Field Emitter Arrays	355	(26)
Characteristics of FEA-Cathode Microwave Tubes	381	(4)
Future Work	385	(8)
References	386	(7)
Index	393