Vacuum Technique

by Rozanov; L.N.

• ISBN13: 9780415273510
• ISBN10: 041527351X
• Format: Hardcover
• Copyright: 2002-04-04
• Publisher: CRC Press

Summary

Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming. Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards. Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.

Author Biography

L. N. Rozanov is head of the department of Information Machinery Technology at St. Petersburg Technical University.

Table of Contents

Introduction	1	(1)
The Concept of Vacuum	1	(1)
History of Vacuum Engineering	2	(1)
Applications of Vacuum Instruments	3	(4)
Properties of Gases at Low Pressures	7	(32)
Gas Pressure	7	(5)
Velocity Distribution of Gas Molecules	12	(2)
Mean Free Path Length	14	(3)
Interaction of Gas Molecules with Surfaces	17	(2)
Adsorption Time	19	(4)
Saturation Pressure	23	(3)
Surface Coverage with Gas Molecules	26	(5)
Gas Dissolution in Solids	31	(3)
Electrical Phenomena	34	(4)
Test Questions	38	(1)
Theory	39	(40)
Degrees of Vacuum	39	(1)
Transport Phenomena	40	(7)
Thermal Equilibrium of Pressures	47	(1)
Calculation of Gas Flow by the Method of Continuum Mechanics	48	(10)
Calculation of Gas Flow Using the Method of Intergral Angular Coefficients	58	(5)
Modeling of Gas Flow	63	(5)
Gas Evolution	68	(5)
Basic Equation	73	(3)
Test Questions	76	(3)
Measurement of Vacuum	79	(50)
Classification of Measurement Methods	79	(3)
Mechanical Methods	82	(5)
Thermal Methods	87	(3)
Electrical Methods of Total Pressure Measurement	90	(9)
Electrical Methods of Measuring Partial Pressure	99	(10)
Sorption Methods	109	(3)
Calibration of Transducers	112	(4)
Measurement of Gas Flows	116	(4)
Leak Detection Methods	120	(7)
Test Questions	127	(2)
Mechanical Methods of Vacuum Production	129	(38)
General Characteristic of Vacuum Pumps	129	(2)
Volume Pumping	131	(5)
Design of Displacement Pumps	136	(8)
Molecular Pumping	144	(5)
Design of Molecular Pumps	149	(2)
Vapor Jet Pumping	151	(7)
Working Liquids	158	(2)
Design of Vapor Jet Pumps	160	(1)
Traps	160	(5)
Test Questions	165	(2)
Physico-Chemical Methods of Vacuum Production	167	(22)
General	167	(1)
Ion Pumping	167	(2)
Chemisorption Pumping	169	(3)
Evaporation Pumps	172	(1)
Cryocondensation Pumping	173	(3)
Cryoadsorption Pumping	176	(5)
Cryogenic Pumps	181	(2)
Getter-Ion Pumping	183	(2)
Getter-Ion Pumps	185	(3)
Test Questions	188	(1)
Analysis of the Vacuum Systems	189	(44)
Typical Vacuum Systems	189	(10)
Calculation of Gas Load	199	(2)
Equations of Steady-State Pumping	201	(3)
Connections of System Elements and Pumped Objects	204	(5)
Connection of Pumps	209	(7)
Time of Pumping	216	(6)
Cost of Pumping	222	(3)
Verifying Calculation of a Vacuum System	225	(5)
An Example of Verifying Calculation	230	(2)
Test Questions	232	(1)
Design of Vacuum Systems	233	(30)
Database of Vacuum System Elements	233	(1)
Structural Design of Vacuum Systems Using the Method of Selecting Variants	234	(4)
Structural Design Using Typical Patterns	238	(1)
Parametric Design of a Vacuum System Using the Utilization Coefficient of Vacuum Pump	239	(3)
Multiparametric Design of a Vacuum System	242	(3)
Schematic Connections and Assembly	245	(2)
Projecting Calculation of a Vacuum System	247	(4)
Example of Projecting Calculation of a Vacuum System in Steady-State Mode	251	(9)
Test Questions	260	(3)
Construction of Vacuum Systems	263	(32)
Materials of Vacuum Engineering	263	(4)
Non-Detachable Connections	267	(7)
Detachable Vacuum Connections	274	(6)
Vacuum Pipelines	280	(2)
Devices for Transmitting Movement to Vacuum	282	(5)
Electrical Vacuum Contacts	287	(2)
Vacuum Valves	289	(5)
Test Questions	294	(1)
Problems	295	(4)
Properties of Gases at Low Temperatures	295	(1)
Theory of Vacuum Engineering	296	(2)
Calculation of Vacuum Systems	298	(1)
Reference Tables	299	(12)
Appendix	311	(34)
A.1 Derivation of the Maxwell--Boltzmann Function (Velocity Distribution of Gas Molecules)	311	(3)
A.2 Average Velocity	314	(1)
A.3 The Equation of Polymolecular Adsorption	314	(3)
A.4 The Equation of Gas Flow Through an Aperture in Viscous Flow Mode	317	(28)
References	345	(2)
Index	347