Vacuum Technology

by Hucknall, David J.; Morris, A.

• ISBN13: 9780854046515
• ISBN10: 0854046518
• Format: Paperback
• Copyright: 2003-05-01
• Publisher: Royal Society of Chemistry

Summary

An accessible and applicable guide to quantitative problem solving in vacuum technology, this book is aimed at newcomers, students and the experienced practitioner. It contains essential information and worked examples for those using vacuum technology in chemical applications and who are involved in the design and operation of vacuum equipment. Using step-by-step solutions of example calculations and formulae, "Vacuum Technology: Calculations in Chemistry" sets out to encourage readers to quantify their own systems so that they can ensure efficient operation and fault finding. Whilst emphasizing the use of appropriate units in calculations and using well-known expressions in vacuum technology throughout, the book includes: --formulae necessary for quantitative vacuum technology --commonly required data for common gases in tabulated form --schematic diagrams of systems and layouts This book is certain to be a confidence-inspiring publication for use in both research and industry.

Author Biography

Dr David Hucknall joined Leybold Vacuum UK Ltd in 1986 and has unrivalled expertise in vacuum technology. Since 1991 he has represented the UK on the European Working Group responsible for drafting standards on leak detection Dr Alan Morris, currently at the University of Southampton, has over 25 years experience in the field of gas phase UV photoelectron spectroscopy. He has contributed to the design and development of spectrometers for the study of unstable species using a wide range of radiation sources

Table of Contents

Principles	1	(30)
Introduction	1	(1)
Survey	1	(1)
Pressure	1	(2)
Ideal Gas Law	3	(2)
Mixtures of Gases: Partial Pressures	5	(3)
Kinetic Theory of Gases	8	(9)
Transport Properties	17	(7)
Diffusion	17	(3)
Viscosity (Internal Friction in Gases)	20	(4)
Gas Dynamics	24	(7)
Gas Flow	31	(25)
Introduction	31	(1)
Definitions	31	(7)
Viscous (Continuum) Flow	38	(5)
Viscous Flow in Ducts and Tubes	38	(5)
Molecular Flow	43	(8)
Conductance of an Aperture	43	(1)
Conductance of Tubes and Ducts	43	(6)
Molecular Flow through Components	49	(2)
Knudsen (Intermediate) Flow Through a Tube	51	(5)
Pumps and Pumping Systems	56	(58)
Introduction	56	(1)
Vacuum Pumps (Rough--Medium Vacuum Range)	57	(19)
Oil-sealed Rotary Pumps	57	(8)
Dry Pumps	65	(2)
Roots Pumps	67	(9)
High/Ultra-high Vacuum Pumps	76	(27)
Diffusion Pumps	78	(7)
Turbomolecular Pumps	85	(7)
Cryopumps	92	(11)
Other High/Ultra-high Vacuum Pumps	103	(11)
Sputter-ion Pumps	103	(5)
Getter Pumps	108	(6)
Gas Sources and Attainable Pressure in Vacuum Systems	114	(34)
Introduction	114	(1)
Leaks	115	(14)
Outgassing	129	(5)
Permeation	134	(6)
Attainable Pressure	140	(8)
Total and Partial Vacuum Pressure Measurement	148	(28)
Introduction	148	(1)
Total Pressure Measurement	148	(20)
Direct Pressure Measurement	149	(3)
Indirect Pressure Measurement	152	(16)
Residual Gas Analysis and Partial Pressure Measurement	168	(8)
Some Applications of Vacuum Technology	176	(43)
Introduction	176	(1)
Chemical Technology	176	(19)
Pressure, Temperature and Phase Changes	177	(2)
Distillation	179	(3)
Evaporation (Drying)	182	(5)
Condensers	187	(5)
Condenser and Vacuum Pump Combinations	192	(3)
UHV Systems	195	(12)
Factors Influencing Outgassing	196	(11)
Systems Involving Differential Pumping	207	(12)
Summary	219	(5)
Bibliography	224	(1)
Appendix: Symbols Used in Vacuum Technology according to BS 5543:1978/ISO 3753:1977	225	(4)
Subject Index	229