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9780198562832

Nanotechnology Integrated Processing Systems for Ultra-precision and Ultra-fine products

by ; ; ; ; ;
  • ISBN13:

    9780198562832

  • ISBN10:

    0198562837

  • Format: Hardcover
  • Copyright: 1996-09-26
  • Publisher: Oxford University Press

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Summary

This book is written by the world leading expert in nanotechnology. Itexamines the manufacture of integrated circuits and opto-electronic devices andthe systems required to achieve accuracy in the nanometre range. Nanotechnologyis essential in the fabrication of extremely precise and fine parts. Thistechnology is vital to the advances being made in various high-tech processes.This highly topical work will therefore be an essential source of reference foracademic and industrial research and research workers particularly inhigh-technology and precision industries.

Table of Contents

Fundamentals of nanotechnology
Nano-machinery
Measuring systems
Positioning systems
Applications of nanotechnology
Nano-grating or 1D scaling systems
Nano-lithography or 2D patterning systems
Nano-forming or 3D shaping systems and surface finishing systems
Fabrication systems for nano-assemblies
Future trends in nanotechnology
Development of nano products and systemization of nanotechnology
Table of Contents provided by Publisher. All Rights Reserved.

Supplemental Materials

What is included with this book?

The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any access cards, study guides, lab manuals, CDs, etc.

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