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9780961672164

Silicon Processing for the VLSI Era: Volume 1 - Process Technology

by ;
  • ISBN13:

    9780961672164

  • ISBN10:

    0961672161

  • Edition: 2nd
  • Format: Hardcover
  • Copyright: 2000-09-01
  • Publisher: Lattice Pr
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List Price: $199.95

Summary

Volume 1: Process Technology

Table of Contents

Silicon: Single-Crystal Growth & Wafer Preparation
1(34)
Crystalline Defects and Gettering
35(35)
Vacuum Technology for Ulsi Applications
70(34)
Basics of Thin Films
104(15)
Cleaning Technology For Ulsi
119(30)
Chemical Vapor Deposition of Amorphous and Polycrystalline Films
149(76)
Silicon Epitaxial Film Growth and Silicon On Insulator
225(40)
Thermal Oxidation of Silicon
265(59)
Diffusion in Silicon
324(47)
Ion Implantation for Ulsi
371(63)
Aluminum Thin Films and Physical Vapor Deposition in Ulsi
434(54)
Lithography I: Optical Photoresists - Material Properties and Process Technology
488(57)
Lithography II: Optical Aligners and Photomasks
545(110)
Dry Etching for Ulsi
655(64)
Multilevel Metallization for Ulsi
719(88)
Cmos Process Integration
807(34)
Assembly and Packaging for Ulsi
841(34)
Appendices 875(4)
Index 879

Supplemental Materials

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