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9780444823120

Small Scale Structures

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  • ISBN13:

    9780444823120

  • ISBN10:

    0444823123

  • Format: Nonspecific Binding
  • Copyright: 2012-12-01
  • Publisher: Elsevier S & T
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Supplemental Materials

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Summary

This book contains the proceedings of 3 symposia dealing with various aspects of small scale structures. Symposium A deals with the development of new materials, including ceramics, polymers, metals, etc., their microstructuring as well as their potential for application in microsystems. All kinds of microsystems are considered, e.g. mechanical, magnetic, optical, chemical, biochemical and issues related to assembly and packaging were also covered.Symposium B deals with four topics: synthesis and preparation of nanostructured ceramics and composites with well-controlled geometric order and chemical composition; coupling of these structures to transducers for current and future chemical and biochemical devices based upon microoptics, microelectronics, microionics, microelectrodes or molecular cages; planar thin film structures and the control of covalent thin film/transducer couplings, the control of selective, stable and sensitive recognition centers at the surface, at grain boundaries or in the bulk of selected nanostructured materials with extremely narrow particle size distributions; analysis of these structures and sensor functions by means of techniques utilizing photons, electrons, ions, or atomic particle beam probes.Symposium E examines the structure-property relationships in thin films and multilayers, from the point of view of both fundamental studies and practical applications.

Table of Contents

Preface
Sponsors
Optimisation of the deposition and annealing parameters of paraelectric PLZT (28/0/100) thin films grown by RF magnetron sputteringp. 1
Conduction properties of amorphous Ta[subscript 2]O[subscript 5] films prepared by plasma enhanced chemical vapour depositionp. 5
Stress gradient and structural properties of atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensorsp. 9
Carbon diffusion in copper-based metal matrix compositesp. 13
The preparation and characterization of electrode materials for solid state batteriesp. 17
Thin film components for solid state lithium batteriesp. 21
Reactive diffusion between monocrystalline 6H-SiC and chromiump. 25
Porous silicon: a novel material for microsystemsp. 31
Microstructuring by nanoparticle impact lithographyp. 37
Nd:YAG-laser-induced wet chemical etching of titanium and stainless steelp. 41
The production of fine metal tracks from a new range of organometallic compoundsp. 47
Photolithography on micromachined 3D surfaces using electrodeposited photoresistsp. 51
Application of conducting polymer technology in microsystemsp. 57
Ultrasonic transducer with silicon: a well known material with new applicationsp. 67
Silicon nitride membrane sensors with monocrystalline transducersp. 71
Anisotropic etching for optical gratingsp. 77
Light-dependent immobilization of biomolecules on material and lipid bilayer membrane surfacesp. 83
Micro-adaptation of chemical sensor materialsp. 89
A new type of arrangement of disc-shaped molecules in Langmuir-Blodgett filmsp. 97
Laser-assisted microstructuring and characterization of polybithiophenep. 103
Author Indexp. 109
Subject Indexp. 110
Table of Contents provided by Blackwell. All Rights Reserved.

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