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Preface | |
Sponsors | |
Optimisation of the deposition and annealing parameters of paraelectric PLZT (28/0/100) thin films grown by RF magnetron sputtering | p. 1 |
Conduction properties of amorphous Ta[subscript 2]O[subscript 5] films prepared by plasma enhanced chemical vapour deposition | p. 5 |
Stress gradient and structural properties of atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors | p. 9 |
Carbon diffusion in copper-based metal matrix composites | p. 13 |
The preparation and characterization of electrode materials for solid state batteries | p. 17 |
Thin film components for solid state lithium batteries | p. 21 |
Reactive diffusion between monocrystalline 6H-SiC and chromium | p. 25 |
Porous silicon: a novel material for microsystems | p. 31 |
Microstructuring by nanoparticle impact lithography | p. 37 |
Nd:YAG-laser-induced wet chemical etching of titanium and stainless steel | p. 41 |
The production of fine metal tracks from a new range of organometallic compounds | p. 47 |
Photolithography on micromachined 3D surfaces using electrodeposited photoresists | p. 51 |
Application of conducting polymer technology in microsystems | p. 57 |
Ultrasonic transducer with silicon: a well known material with new applications | p. 67 |
Silicon nitride membrane sensors with monocrystalline transducers | p. 71 |
Anisotropic etching for optical gratings | p. 77 |
Light-dependent immobilization of biomolecules on material and lipid bilayer membrane surfaces | p. 83 |
Micro-adaptation of chemical sensor materials | p. 89 |
A new type of arrangement of disc-shaped molecules in Langmuir-Blodgett films | p. 97 |
Laser-assisted microstructuring and characterization of polybithiophene | p. 103 |
Author Index | p. 109 |
Subject Index | p. 110 |
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