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9781420045680

Photonic MEMS Devices: Design, Fabrication and Control

by ;
  • ISBN13:

    9781420045680

  • ISBN10:

    1420045687

  • Format: Hardcover
  • Copyright: 2008-09-04
  • Publisher: CRC Press

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Summary

Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today's researchers are in need of a reference that goes beyond to include all aspects of engineering innovation.

Table of Contents

MEMS Optical Switches and Systemsp. 1
Design of MEMS Optical Switchesp. 27
MEMS Thermo-Optic Switchesp. 89
PHC Microresonators Dynamic Modulation Devicesp. 129
MEMS Variable Optical Attenuatorsp. 173
MEMS Discretely Tunable Lasersp. 237
MEMS Continuously Tunable Lasersp. 273
MEMS Injection-Locked Lasersp. 317
Deep Etching Fabrication Processp. 353
Deep Submicron Photonic Bandgap Crystal Fabrication Processesp. 393
Control Strategies for Electrostatic MEMS Devicesp. 429
Control of Optical Devicesp. 447
Indexp. 467
Table of Contents provided by Ingram. All Rights Reserved.

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